Description of Zr Zirconium Sputtering Target

Zirconium serves as a reliable sputtering source thanks to its outstanding corrosion resistance and favourable chemical stability. Variations in raw‑material purity and grain structure will directly affect thin‑film homogeneity and long‑term coating repeatability. Our Zr zirconium sputtering targets adopt high‑grade raw materials with strict impurity management. These targets are well‑suited for anti‑corrosion functional films, semiconductor layers, and multi‑layer optical coatings. Every target completes strict dimensional verification and thorough surface quality assessment before shipment. Available in multiple formats to fit laboratory prototyping and industrial coating production. Fine‑tuned material quality delivers predictable deposition results, helping your R&D and manufacturing projects maintain stable output for various high‑performance thin‑film applications.

Features of Zr Zirconium Sputtering Target

1. High-purity zirconium for advanced thin films 

2. Excellent corrosion resistance in coatings 

3. Ideal for optical and decorative layers  

4. Custom sizes for your sputtering system 

5. Dense grain structure for even erosion 

6. Low gas emission for stable plasma

7. Suitable for DC and RF magnetron

8. Supplied with complete purity certificates  

9. Vacuum-packed to prevent oxidation  

10. Quick shipping for research deadlines

Applications of Zr Zirconium Sputtering Target

• Decorative coating 

• Hardware tool coating

• Semiconductor

• Optical coating

Specifications of Zr Zirconium Sputtering Target

Circular Sputtering Targets(Diameter): 1.0”2.0”3.0”4.0”5.0”6.0” up to 21”

Rectangular Sputtering Targets(Width x Length): 5” x 12”5” x 15”5” x 20”5” x 22”6” x 20”

Thickness: 0.125”,   0.25”

Shape: Disc/Rectangular/Tube

Bonding: Unbonding/Bonding

Purity: 2N(99%), 3N(99.9%), 3N5(99.95%).

Manufacturing Process of Zr Zirconium Sputtering Target

• Melting

• Analysis

• Casting & Grain refinement

  Forging, Rolling, Annealing, Micrography, Machining

  Thermomechanical treatment

• Cleaning and final packaging - Cleaned for use in vacuum

  Protection from environmental contaminants

  Protection during shipment